Large-scale phase retreival for metrology invited talk

This talk will describe two different microscope setups for achieving quantitative phase images in a commercial microscope using simple hardware. First, we discuss methods that use a stack of intensity images captured through focus in order to reconstruct phase, which can be related to surface height maps for applications in surface profiling and metrology. Second, we describe a new LED array microscope that enables phase profiling across a very large field-of-view (2mm) with high resolution (0.7 NA), by patterning the illumination angles with an LED array illuminator and implementing Fourier Ptychography. Both methods are implemented with simple hardware modifications to traditional microscopes and both exhibit stable, accurate and robust quantitative phase inversion algorithms.