DocumentCode
3667376
Title
High-speed optical interferometry of micro and nanothermal wave propagation induced by current flow in metal interconnect lines
Author
Lucas N. Taylor;Joseph J. Talghader
Author_Institution
Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, United States
fYear
2015
Firstpage
1
Lastpage
2
Abstract
Thermal deformation waves in a soda-lime-silica glass substrate were measured using high-speed Hilbert-phase interferometry during interconnect heating and Q-switched Nd:YAG irradiation. 100-microsecond thermal events were captured with 256×256 resolution over a 100 micron square area.
Keywords
"Heating","Optical interferometry","Cameras","Temperature measurement","Optical pulses","High-speed optical techniques","Glass"
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
ISSN
2160-5033
Print_ISBN
978-1-4673-6834-6
Electronic_ISBN
2160-5041
Type
conf
DOI
10.1109/OMN.2015.7288881
Filename
7288881
Link To Document