• DocumentCode
    3667387
  • Title

    An electrostatic two-axis gimbaled mirror scanner with tilted stationary vertical combs fabricated by self-aligned micro-assembly

  • Author

    Seunghwan Moon;Jaekwon Lee;Dongseong Yang;Joho Yun;Juhun Lim;Jong-Hyun Lee;Min-Joo Gwak;Kyung-Su Kim

  • Author_Institution
    Gwangju Institute of Science and Technology (GIST), Republic of Korea
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    An electrostatic two-axis gimbaled mirror scanner was demonstrated using tilted stationary vertical combs and self-aligned micro-assembly. Side stability was enhanced and the optical scan angles were 6.8/15.4 degrees on the slow/fast axes, respectively.
  • Keywords
    "Biomedical optical imaging","Optical device fabrication","Mirrors","Electrostatics","Optical imaging","Optical reflection"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4673-6834-6
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMN.2015.7288892
  • Filename
    7288892
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3667387