Title :
Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor
Author :
Yuki Kiuchi;Yoshihiro Taguchi;Yuji Nagasaka
Author_Institution :
School of Integrated Design Engineering, Keio University, Yokohama, Japan
Abstract :
A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.
Keywords :
"Mirrors","Micromechanical devices","Optical sensors","Actuators","High-speed optical techniques","Biomedical optical imaging","Optical variables measurement"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Print_ISBN :
978-1-4673-6834-6
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2015.7288894
