• DocumentCode
    3667389
  • Title

    Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor

  • Author

    Yuki Kiuchi;Yoshihiro Taguchi;Yuji Nagasaka

  • Author_Institution
    School of Integrated Design Engineering, Keio University, Yokohama, Japan
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.
  • Keywords
    "Mirrors","Micromechanical devices","Optical sensors","Actuators","High-speed optical techniques","Biomedical optical imaging","Optical variables measurement"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4673-6834-6
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMN.2015.7288894
  • Filename
    7288894
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3667389