Modeling of electrostatically actuated fluid flow system for mixed-domain simulation

Modeling of an electrically driven fluid flow system for multi-domain simulation is reported. The electrically driven actuator force is considered by an actuator component model, based on a spring-mass-damper system with force balance formulation. The fluid flow model is developed on the basis of a Kirchhoffian network which is derived from the mass transport equation. The actuator and the fluid models are coupled through equivalent circuits, leading to a consistent approach of mixed-domain system simulation. This approach is applied to design a flexible blood pumping system where the blood flow is driven by electrical organic actuators. Modeled results are compared with 2D device simulation based on the finite element method.