DocumentCode :
3667967
Title :
Influence of mechanical strain in Si and Ge p-type double gate MOSFETs
Author :
M. Moussavou;N. Cavassilas;E. Dib;M. Bescond
Author_Institution :
IM2NP, UMR CNRS 7334, Marseille, France
fYear :
2015
Firstpage :
373
Lastpage :
376
Abstract :
We theoretically investigate the impact of uniaxial strain in extremely thin Si and Ge p-type double gate transistors. Quantum transport modeling is treated using a 6-band k.p Hamiltonian and the non-equilibrium Green´s function formalism including hole-phonon scattering. Based on this framework we analyze the influence of strain on current characteristics considering different transport directions and gate length´s. The results first confirm the dominance of Ge in long devices (15 nm gate length) for which best electrical performances are obtained for channels along <; 110 > with a uniaxial compressive strain. Situation is reversed for shorter devices (7 nm gate length) where the small effective masses of Ge deteriorate the off-regime of transistors regardless the considered strain. Due to weaker hole-phonon scattering, <; 100 > Si devices with a tensile strain are interestingly found to be more competitive than their <; 110 >-compressive counterparts.
Keywords :
"Strain","Silicon","Scattering","Effective mass","Logic gates","MOSFET"
Publisher :
ieee
Conference_Titel :
Simulation of Semiconductor Processes and Devices (SISPAD), 2015 International Conference on
ISSN :
1946-1569
Print_ISBN :
978-1-4673-7858-1
Type :
conf
DOI :
10.1109/SISPAD.2015.7292337
Filename :
7292337
Link To Document :
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