Analysis of MEMS electrostatic comb drive with polysilicon as the structural material

Microelectromechanical Systems (MEMS) has led to a drastic development in the field of sensors. This paper presents a new design of a electrostatic comb drive with different parameters. The analysis of MEMS electrostatic comb drive is done with different structures. An increased displacement of lateral comb drive actuator will subsequently be accomplished with the same actuation voltage. COMSOL Multyphysics 4.4 is used for designing the comb drive. It offers Finite element analysis to prove the concept of displacement of movable comb fingers, achieved by the amount of electrostatic force generated by the device.