Title :
Understanding capacitance-voltage nonlinearities in microelectronic metal-insulator-metal (MIM) capacitors
Author :
P. Gonon;C. Vallée
Author_Institution :
LTM (Microelectronics Technology Laboratory), UGA (Univ. Grenoble Alpes), France
fDate :
7/1/2015 12:00:00 AM
Abstract :
Voltage nonlinearity is studied in microelectronic metal / insulator (oxide) / metal capacitors. The influence of electrodes (work function, oxygen affinity) and test parameters (dc or ac bias, frequency) are investigated. A physical model is proposed to explain the capacitance-voltage relation. The model is based on electronic hopping trough oxygen vacancy defects.
Keywords :
"Capacitance","Electron traps","Capacitors","MIM capacitors","Gold","Cathodes"
Conference_Titel :
Properties and Applications of Dielectric Materials (ICPADM), 2015 IEEE 11th International Conference on the
Electronic_ISBN :
2160-9241
DOI :
10.1109/ICPADM.2015.7295352
