• DocumentCode
    3670018
  • Title

    Understanding capacitance-voltage nonlinearities in microelectronic metal-insulator-metal (MIM) capacitors

  • Author

    P. Gonon;C. Vallée

  • Author_Institution
    LTM (Microelectronics Technology Laboratory), UGA (Univ. Grenoble Alpes), France
  • fYear
    2015
  • fDate
    7/1/2015 12:00:00 AM
  • Firstpage
    636
  • Lastpage
    639
  • Abstract
    Voltage nonlinearity is studied in microelectronic metal / insulator (oxide) / metal capacitors. The influence of electrodes (work function, oxygen affinity) and test parameters (dc or ac bias, frequency) are investigated. A physical model is proposed to explain the capacitance-voltage relation. The model is based on electronic hopping trough oxygen vacancy defects.
  • Keywords
    "Capacitance","Electron traps","Capacitors","MIM capacitors","Gold","Cathodes"
  • Publisher
    ieee
  • Conference_Titel
    Properties and Applications of Dielectric Materials (ICPADM), 2015 IEEE 11th International Conference on the
  • Electronic_ISBN
    2160-9241
  • Type

    conf

  • DOI
    10.1109/ICPADM.2015.7295352
  • Filename
    7295352
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3670018