• DocumentCode
    3671948
  • Title

    Foreword

  • Author

    Robson Nunes de Lima

  • Author_Institution
    Federal University of Bahia - UFBA, Brazil
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    The SBMicro symposium is an international forum dedicated to fabrication and modeling of microsystems, integrated circuits and devices, held annually in Brazil. The goal of the symposium is to bring together researchers in the areas of processing, materials, characterization, modeling and TCAD of integrated circuits, microsensors, microactuators and MEMS.
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics Technology and Devices (SBMicro), 2015 30th Symposium on
  • Type

    conf

  • DOI
    10.1109/SBMicro.2015.7298097
  • Filename
    7298097
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3671948