Comparative analysis of simulation results and experimental data of deflection of silicon membrane of MEMS pressure sensor

The article presented research results of stressed and strained state of sensitive element of MEMS sensor depending on the pressure applied. A code for the ANSYS system was developed allowing to automate the process of constructing a solid model of pressure sensor and stressed and deformed state, taking into account technological features of their production. As a result of the program processing one gets graphical dependencies in the plate of the sensor and it´s maximum displacement depending on the pressure applied. Experimental study of sensitive element of pressure sensor was conducted, which enable to compare simulation results with experimentally obtained.