Finite element method design and analysis of a MEMS comb drive

The purpose of this paper is to determine an optimum design for a DC-actuated, jagged-edge shaped comb drive incorporable in micro electromechanical systems (MEMS) as gripper actuator for micro-robotics domain precise manipulation. The commercial Comsol Multiphysics software based on finite element method (FEM) was used to carry out all the simulations in the 2D domain. Several geometries were analyzed here, starting with the design having a minimum and maximum gap distances between fingers of 3 and 7 μm, wich complies with the Multi-User MEMS Process (MUMPs). Comb displacement with respect to actuation voltage and electrostatic force acting upon the movable comb teeth as a function of finger displacement were plotted and compared to all the designs.