An advanced electro-thermal simulation methodology for nanoscale device

In this work we propose an advanced electrothermal simulation methodology for nanoscale devices based on a macroscopic model for acoustic and optical phonon energy transfer. This is coupled with the Poisson equation and Current Continuity Equations (CCE) and solved self-consistently. This has been implemented in the GSS `atomistic´ simulator GARAND, and the coupled 3D electro-thermal simulation using this methodology is demonstrated on an SOI FinFET example.