• DocumentCode
    3674607
  • Title

    Thin film resistance temperature sensors on GaAs

  • Author

    T. Lalinsky;I. Hotovy;S. Hascik;Z. Mozolova;J. Kuzmik;D. Pogany

  • Author_Institution
    Inst. of Electr. Eng., Slovak Acad. of Sci., Bratislava, Slovakia
  • fYear
    1998
  • Firstpage
    243
  • Lastpage
    246
  • Abstract
    Thin film resistance temperature sensors on GaAs has been developed as an alternative replacement to the temperature sensing Schottky diodes in the power sensor microsystem. Current-voltage and low frequency noise measurements of the temperature sensor have been carried out to analyze the sensor performances. Better noise performance of the resistance sensors compared to the Schottky one has been found.
  • Keywords
    "Thin film sensors","Temperature sensors","Gallium arsenide","Low-frequency noise","Schottky diodes","Current measurement","Electrical resistance measurement","Frequency measurement","Noise measurement","Temperature measurement"
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices and Microsystems, 1998. ASDAM ´98. Second International Conference on
  • Print_ISBN
    0-7803-4909-1
  • Type

    conf

  • DOI
    10.1109/ASDAM.1998.730209
  • Filename
    730209
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3674607