DocumentCode
3674730
Title
Study of bimetallic effect in a GaAs cantilever beam of power sensor microsystem
Author
T. Lalinsky;M. Drzik;S. Hascik;I. Mozolova;J. Kuzmik;Z. Hatzopoulos
Author_Institution
Inst. of Electr. Eng., Slovak Acad. of Sci., Bratislava, Slovakia
fYear
1998
Firstpage
331
Lastpage
334
Abstract
A bimetallic effect in a 2-/spl mu/m-thick GaAs cantilever beam of power sensor microsystem (PSM) is studied using both the microscopic laser optical interferometry and laser optical reflectance measurement. The cantilever beam deflections induced by the different thermal expansion of the GaAs cantilever layer and the top device metallic leads are sensed at different power dissipations in the PSM heater. The key transfer characteristics of the PSM are found. The cantilever bimetallic effect is also considered to be used for the electrical power sensing.
Keywords
"Gallium arsenide","Structural beams","Optical sensors","Optical microscopy","Power lasers","Optical interferometry","Reflectivity","Power measurement","Thermal expansion","Power dissipation"
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices and Microsystems, 1998. ASDAM ´98. Second International Conference on
Print_ISBN
0-7803-4909-1
Type
conf
DOI
10.1109/ASDAM.1998.730228
Filename
730228
Link To Document