Low-power, high-gain transimpedance amplifier for processing ultra low AC current MEMS output

This paper presents a transimpedance amplifier designed in IHP SiGe 0.25 µm BiCMOS technology for processing nA currents delivered by MEMS in Wake-Up receiver system. Mechanical movement produces change in capacitance on MEMS structure resulting in small sinusoidal current which needs to be amplified and converted into square wave signal. This function is provided by an integrated chip with high gain, low power analog part sensitive to small currents. Chip is taped out and measured.