Propagation and scattering in a microwave plasma chamber

The paper presents the analysis of propagation and scattering in a microwave plasma chamber. The chamber consists of a looped circular waveguide with the TE₁₁ mode excited by the TE₁₀ mode from a linear rectangular waveguide. The microwave power extracted through a slit along the cavity wall that is lined by quartz permeates the oxygen injected in the center and ionized by 50,000 volts hence creating plasma. The complexity of the scattering of the field through the quartz and propagating in the plasma provides several challenges to obtaining a uniform field distribution within the chamber. A nonlinear Drude model of the plasma in CST (Computer Simulation Technology) has been developed to analyze the scattered field in the plasma region.