Ultra broadband multiple feed antenna for efficient on-chip power combining

A multiple feed on-chip antenna is realized in a SiGe seven metal layer backend process. The principle of an integrated lens antenna (ILA) is used and this work presents the proof-of-concept for a power-combining antenna since it can be directly connected to differential amplifiers. For measurements an adequate feeding network has to be designed which should provide the same broadband characteristic as the antenna itself. The measured antenna reaches a return loss better than -10 dB in a frequency range of 210 to 320 GHz and a realized gain of 17.5 to 23 dBi, including a power-splitter. The simulated efficiency of the on-chip antenna element, excluding the feeding network, exceeds 75%.