Title :
Reliability study of digital silicon photonic MEMS switches
Author :
Tae Joon Seok;Niels Quack;Sangyoon Han;Wencong Zhang;Richard S. Muller;Ming C. Wu
Author_Institution :
University of California, Berkeley, 253M Cory Hall, Berkeley CA 94720, USA
Abstract :
We report on the reliability test of 50×50 digital silicon photonic MEMS switches. The switch operates reliably over 10 billion cycles and up to 48 hours of continuous contact in ambient environment without packaging.
Keywords :
"Optical switches","Couplers","Optical waveguides","Reliability","Optical imaging","Optical network units","Voltage measurement"
Conference_Titel :
Group IV Photonics (GFP), 2015 IEEE 12th International Conference on
DOI :
10.1109/Group4.2015.7305908
