• DocumentCode
    3677269
  • Title

    Fabrication of high bit rate, monolith ically integrated receivers in photonic BiCMOS technology

  • Author

    D. Knoll;S- Lischke;L. Zimmermann;A. Awny;M. Kroh; Peczek;K. Voigt;K. Petermann

  • Author_Institution
    IHP. Im Technologiepark 25, 15236 Frankfurt (Oder). Germany
  • fYear
    2015
  • Firstpage
    181
  • Lastpage
    182
  • Abstract
    We present results of photonic BiCMOS process development enabling the fabrication of monolithically integrated receivers for 40Gbps and beyond. Focus is on the challenge to fabricate simultaneously 200GHz SiGe HBTs and Ge photodiodes with enough bandwidth.
  • Keywords
    "Photonics","BiCMOS integrated circuits","Receivers","Photodiodes","Heterojunction bipolar transistors","Annealing","Silicon germanium"
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2015 IEEE 12th International Conference on
  • Type

    conf

  • DOI
    10.1109/Group4.2015.7305923
  • Filename
    7305923
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3677269