Title :
Hydrogenated amorphous silicon photonic devices on synthetic quartz glass substrate
Author :
Makoto Okano;Emiko Omoda;Yuriko Maegami;Yuki Atsumi;Youichi Sakakibara;Toshihiro Kamei;Masahiko Mori
Author_Institution :
National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
Abstract :
We have fabricated hydrogenated amorphous silicon (a-Si:H) photonic devices on a synthetic quartz glass substrate. a-Si:H-wire waveguides, ring resonators, and directional couplers were successfully fabricated using a i-line stepper lithograpy.
Conference_Titel :
Group IV Photonics (GFP), 2015 IEEE 12th International Conference on
DOI :
10.1109/Group4.2015.7305942
