Title :
Low-loss silicon rectangular waveguides fabricated by anisotoropic wet etching for roughness reduction
Author :
Hideo Arimoto;Muhammad K. Husain;Alyssa Prasmusinto;Kapil Debnath;Abdelrahman Al-Attili;Rafidah Petra;Harold M. H. Chong;Graham T. Reed;Shinichi Saito
Author_Institution :
Faculty of Physical Sciences and Engineering. University of Southampton, Southampton. SO17 1BJ, UK
Abstract :
Simple fabrication of low-loss Si/SiO2 waveguides with a flat side wall is proposed. Waveguides oriented to the <;11-2> direction on the Si (110) plane are fabricated by anisotropic wet etching and the lowest propagation loss is 1.4 dB/cm.
Keywords :
"Optical waveguides","Silicon","Etching","Optical device fabrication","Propagation losses","Optical losses"
Conference_Titel :
Group IV Photonics (GFP), 2015 IEEE 12th International Conference on
DOI :
10.1109/Group4.2015.7305962
