• DocumentCode
    3677316
  • Title

    Development of silicon nitride arrayed waveguide grating by physical vapor deposition at room temperature

  • Author

    Papichaya Chaisakul;Ziyi Zhang;Moloki Yako;Delphine Marris-Morini;Laurent Vivien;Naoyuki Kawai;Kazumi Wada

  • Author_Institution
    Department of Materials Engineering, the University of Tokyo. Hongo 7-3-1 Bunkyo-ku, Tokyo 113-8656. Japan
  • fYear
    2015
  • Firstpage
    104
  • Lastpage
    105
  • Abstract
    We designed and fabricated SiN4-based AWG using physical vapor deposition technique at room temperature, compatible with low thermal budget over a wide application range. Preliminary results indicate filtering performances capable of dense WDM on a chip.
  • Keywords
    "Arrayed waveguide gratings","Silicon","Optical filters","Optical device fabrication","Optical crosstalk","Optical receivers"
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2015 IEEE 12th International Conference on
  • Type

    conf

  • DOI
    10.1109/Group4.2015.7305971
  • Filename
    7305971
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3677316