Title :
Pd Schottky barrier photodetector integrated with LOCOS-defined SOI waveguides
Author :
Shuxia Li;N. Garry Tarr;Winnie Ye;Pierre Berini
Author_Institution :
Department of Electronics, Carleton University, Ottawa, Canada
Abstract :
Palladium on n-type silicon Schottky barrier photodetectors have been integrated with SOI optical waveguides. The diodes gave optical responsivity of 330 nA/mW at 1310 nm. Dark current density is less than 2×10-8 Acm-2 at 1 volt reverse bias.
Keywords :
Decision support systems
Conference_Titel :
Group IV Photonics (GFP), 2015 IEEE 12th International Conference on
DOI :
10.1109/Group4.2015.7305975
