Title :
On chip test structure for fabrication error estimation based on a sequence of coupled resonators
Author :
M. Borghi;M. Mancinelli;J. M. Fedeli;L. Pavesi
Author_Institution :
University of Trento Via Somarive 14. Povo (TN) 38123, Italy
Abstract :
We report on the realization of an on chip test structure which quantifies the degree of fabrication error of a photolithographic process. The device is based on a sequence of coupled resonators and allows performing a direct on chip test measurement.
Keywords :
"Optical resonators","Lithography","Wavelength measurement","Optical waveguides","Optical coupling","Optical device fabrication"
Conference_Titel :
Group IV Photonics (GFP), 2015 IEEE 12th International Conference on
DOI :
10.1109/Group4.2015.7305990
