DocumentCode
3683100
Title
Probabilistic analytical benchmarking for ESDS manufacturing process
Author
L. H. Koh;C. B. Goh;Y. H. Goh
Author_Institution
Everfeed Technology Pte Ltd, 2 Tuas Link 1, Jurong Industrial Estate, 638590 Singapore
fYear
2015
Firstpage
1
Lastpage
5
Abstract
A chronological ESD process analysis is proposed to identify the root cause of ESD sensitive devices´ premature failure due to several field returns which exceeded customers´ factory targeted ESD failure control threshold. Two novel quantitative ESD risk indices are proposed to benchmark the process ESD capability using probabilistic statistical technique.
Keywords
"Electrostatic discharges","Production facilities","Benchmark testing","Probabilistic logic","Reliability","Ionization"
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2015 37th
Type
conf
DOI
10.1109/EOSESD.2015.7314736
Filename
7314736
Link To Document