Title :
Manufacturing changes air ionization technology
Author_Institution :
Electronics Workshop, Dangelmayer Associates, 1321 Walnut Street, Berkeley, California 94709 USA
Abstract :
Manufacturing has brought increased semiconductor device functionality through smaller geometries, larger wafer sizes, and faster operating speeds, as well as increased disk drive storage density and display sizes. To produce these advanced technologies the use of air ionization for static control has changed. This paper explores new ionization requirements and methods.
Keywords :
"Manufacturing","Electrostatic discharges","Ionization","Corona","Production","Automation","Surface treatment"
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2015 37th
DOI :
10.1109/EOSESD.2015.7314759
