• DocumentCode
    3683413
  • Title

    System of remote access to nanotechnology facility “Nanofab-100” for design UHF electronics

  • Author

    Kirill K. Lavrentyev;Vladimir K. Nevolin;Roman Yu. Rozanov;Konstantin A. Tsarik

  • Author_Institution
    National Research University of Electronic Technology, Moscow, Russia
  • fYear
    2015
  • Firstpage
    165
  • Lastpage
    168
  • Abstract
    A remote access to nanotechnology facility “Nanofab- 100” allows to remotely manage the creation and investigation of structures of electronic devices with nanoscale elements, in particular, high-power microwave HEMT-transistors based on nitride heterostructures and surface acoustic wave sensors and to develop technological routes of manufacturing thereof. Students from different countries will be able to learn nanotechnology remotely using the educational complex “Nanofab Online”. This system allows remote access to researchers and students (bachelors and masters) for study the processes of molecular beam epitaxy (MBE), focused ion beam (FIP) and the methods of scanning probe microscopy (AFM).
  • Keywords
    "Nanotechnology","Lithography","Electron microscopy","Etching"
  • Publisher
    ieee
  • Conference_Titel
    Internet Technologies and Applications (ITA), 2015
  • Print_ISBN
    978-1-4799-8036-9
  • Type

    conf

  • DOI
    10.1109/ITechA.2015.7317389
  • Filename
    7317389