Thin-film microelectronic wearable body sensors

This review of various applications of well-established thin-film processing techniques to wearable body sensors gives examples of work done in the author´s laboratory over many years. Sensors for the vital signs of body temperature, electrocardiogram, heart rate, breathing pattern and breathing rate are presented along with other applications. Thin-film based sensors have the advantage of small size, high surface area to mass ratio, flexibility, capability for batch production, and compatibility with other microelectronic technologies.