Increasing current testing resolution

The purpose of this paper is to experimentally show that I/sub DDQ/ testing has a rather poor resolution when used to estimate additional current caused by active defects, and that a significant current testing resolution can be obtained with simple data processing. We propose a methodology based on the use of two different criteria the two kinds of current defects-passive and active. This paper represents the first step and deals with active defects. Here we compare different methods applied to estimate additional current caused by this sort of defects. Using Sematech Project S121 data, we show that a resolution gain of 10 over I/sub DDQ/ testing can be reached with simple data processing.