• DocumentCode
    3687152
  • Title

    Optimization on the preparation of microfluidic channel using dry film resist

  • Author

    Firdaus Kamuri;Zurina Zainal Abidin;Nurul Amziah Md Yunus;Mohd Nizar Hamidon;Mohd Hanif Yaacob;Suryani Kamarudin;Siti Zalikha Zhukhi

  • Author_Institution
    Department of Chemical and Environmental Engineering, Universiti Putra Malaysia, Selangor, Malaysia
  • fYear
    2015
  • fDate
    5/1/2015 12:00:00 AM
  • Firstpage
    11
  • Lastpage
    15
  • Abstract
    In this work, microfluidic channel was explored using dry film resist (DFR) method. Many of previous studies used SU-8 and PDMS as the medium to fabricate microfluidic channel for making a microfluidic chamber. Microscope slides were used as the substrate for the applications with bio components since it is inert and stable. The DFR serves to be the spacer to form the channel. Several processes which include cleaning, drying, prebaking, laminating, UV exposure and finally post-baking were involved in channel making. These processes need to be optimized in order to obtain a good chamber. Silicon rubber and UV glue were used to seal the chamber system to prevent any leakages.
  • Keywords
    "Microfluidics","Substrates","Resists","Films","Glass","Fabrication","Microchannels"
  • Publisher
    ieee
  • Conference_Titel
    Smart Sensors and Application (ICSSA), 2015 International Conference on
  • Type

    conf

  • DOI
    10.1109/ICSSA.2015.7322501
  • Filename
    7322501