• DocumentCode
    3688031
  • Title

    Sol-gel imprint lithography for guided mode resonance structures

  • Author

    Yin Huang;Longju Liu;Benjamin Ch´ng;Meng Lu

  • Author_Institution
    Department of Electrical and Computer Engineering, Iowa State University, Ames, 50011, USA
  • fYear
    2015
  • Firstpage
    367
  • Lastpage
    368
  • Abstract
    A sol-gel based imprint lithography process has been developed to fabricate guided-mode resonance (GMR) structures. The inexpensive process offers a rapid means to create sub-micron grating waveguide structures over large surface areas. Both one-dimensional and two-dimensional GMR devices have been successfully fabricated and characterized.
  • Keywords
    "Optical device fabrication","Glass","Dielectrics","Optical waveguides","Gratings"
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (IPC), 2015
  • ISSN
    1092-8081
  • Type

    conf

  • DOI
    10.1109/IPCon.2015.7323457
  • Filename
    7323457
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3688031