• DocumentCode
    3688115
  • Title

    Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources

  • Author

    Reiho Amano;Thanh-Hung Dinh;Atsushi Sasanuma;Goki Arai;Yusuke Fujii;Kenichiro Nanto;Akihiko Takahashi;Daisuke Nakamura;Tatsuo Okada;Tetsuya Makimura;Taisuke Miura;Akira Endo;Tomas Mocek;Padraig Dunne;Gerry O´Sullivan;Takeshi Higashiguchi

  • Author_Institution
    Dept. of Electr. &
  • fYear
    2015
  • Firstpage
    78
  • Lastpage
    79
  • Abstract
    We produced a 3-15-ns CO2 laser pulse with 1011 W/cm2 for an efficient extreme ultraviolet (EUV) source by rare earth element of Gd. The EUV emission was observed a sharp spectral structure at 6.79 nm.
  • Keywords
    "Production","Fabrication","Apertures","Optical switches","Biomedical optical imaging","Stimulated emission"
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (IPC), 2015
  • ISSN
    1092-8081
  • Type

    conf

  • DOI
    10.1109/IPCon.2015.7323554
  • Filename
    7323554
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3688115