Title :
Comparison of the 2D and 3D integrated circuit fabrication process for visible imaging SPAD arrays
Author :
Valerian Lalucaa;Philippe Martin-Gonthier;Pierre Magnan
Author_Institution :
University of Toulouse, ISAE, Image sensor research team, 31055 France
Abstract :
SPAD arrays for visible imaging are analyzed in order to assess the gain of performances with a 3D integration process. A practical example is given with the available design kit of a two layer technology.
Keywords :
"Three-dimensional displays","Photonics","CMOS integrated circuits","Integrated circuit interconnections","Imaging","CMOS technology","Substrates"
Conference_Titel :
Photonics Conference (IPC), 2015
DOI :
10.1109/IPCon.2015.7323586
