• DocumentCode
    3688168
  • Title

    Dispersion properties of bent silicon nitride waveguides

  • Author

    Kentaro Furusawa;Norihiko Sekine;Akifumi Kasamatsu;Yoshinori Uzawa

  • Author_Institution
    National Institute of Information and Communications Technology (NICT), Koganei, Japan
  • fYear
    2015
  • Firstpage
    359
  • Lastpage
    360
  • Abstract
    We discuss the dispersion properties of silicon nitride waveguides by taking into account the effect of bending, as relevant to microring resonators. Material dispersion characterized by near-infrared spectroscopic ellipsometry is also presented.
  • Keywords
    "Ellipsometry","Silicon nitride","Optimization"
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (IPC), 2015
  • ISSN
    1092-8081
  • Type

    conf

  • DOI
    10.1109/IPCon.2015.7323613
  • Filename
    7323613
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3688168