Title :
Fabrication of subwavelength grating based optical nano-hairs using ALD nano-patterning
Author :
Indumathi Raghu Srimathi;William F. Delaney;Eric G. Johnson
Author_Institution :
Center for Optical Materials Science and Engineering Technologies (COMSET), Holcombe Department of Electrical and Computer Engineering, Clemson University, SC 29634, USA
Abstract :
This paper introduces a novel concept for fabrication of subwavelength grating based beam shaping elements. The optical nano-hair structures are made from high-κ dielectrics using nano-patterning techniques and an atomic layer deposition tool.
Keywords :
"Gratings","Coatings","Lead","Three-dimensional displays","Atom optics","Optical device fabrication","Optical films"
Conference_Titel :
Photonics Conference (IPC), 2015
DOI :
10.1109/IPCon.2015.7323679
