• DocumentCode
    3688231
  • Title

    Fabrication of subwavelength grating based optical nano-hairs using ALD nano-patterning

  • Author

    Indumathi Raghu Srimathi;William F. Delaney;Eric G. Johnson

  • Author_Institution
    Center for Optical Materials Science and Engineering Technologies (COMSET), Holcombe Department of Electrical and Computer Engineering, Clemson University, SC 29634, USA
  • fYear
    2015
  • Firstpage
    516
  • Lastpage
    517
  • Abstract
    This paper introduces a novel concept for fabrication of subwavelength grating based beam shaping elements. The optical nano-hair structures are made from high-κ dielectrics using nano-patterning techniques and an atomic layer deposition tool.
  • Keywords
    "Gratings","Coatings","Lead","Three-dimensional displays","Atom optics","Optical device fabrication","Optical films"
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (IPC), 2015
  • ISSN
    1092-8081
  • Type

    conf

  • DOI
    10.1109/IPCon.2015.7323679
  • Filename
    7323679
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3688231