DocumentCode :
3688244
Title :
Low-insertion loss submicron Ta2O5 channel waveguide with inverse taper structure
Author :
Chung-Lun Wu;Bo-Tsang Chen;Wei-Chen Tien;Yuan-Yao Lin;Ann-Kuo Chu;Yi-Jen Chiu;Chao-Kuei Lee
Author_Institution :
Department of Photonics, National Sun Yat-sen University, Kaohsiung 804, Taiwan R. O. C.
fYear :
2015
Firstpage :
328
Lastpage :
329
Abstract :
The crack-free and low surface roughness of Ta2O5 film has been deposited by magnetron sputtering technique. The propagation loss of 1.5 dB/cm with the total coupling loss of 3.2 dB for the Ta2O5 based channel waveguide with inverse taper structure has been successfully demonstrated.
Keywords :
"Annealing","Magnetic cores","Propagation losses","Magnetic films","Magnetic resonance imaging","Monitoring","Insertion loss"
Publisher :
ieee
Conference_Titel :
Photonics Conference (IPC), 2015
ISSN :
1092-8081
Type :
conf
DOI :
10.1109/IPCon.2015.7323692
Filename :
7323692
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3688244
بازگشت