DocumentCode
3688984
Title
UTBB FDSOI: Evolution and opportunities
Author
Thomas Skotnicki;Stephane Monfray
Author_Institution
STMicroelectronics, 850 rue Jean Monnet 38920 Crolles cedex, France
fYear
2015
Firstpage
76
Lastpage
79
Abstract
As today´s 28nm FDSOI technology is at the industrialization level, this paper aims to summarize the key advantages allowed by the thin BOX (Buried Oxide) of the FDSOI, through the technology evolution but also through new opportunities, wider than logic applications and extending the possibility offered by the technology.
Keywords
"Decision support systems","Hafnium"
Publisher
ieee
Conference_Titel
Solid State Device Research Conference (ESSDERC), 2015 45th European
ISSN
1930-8876
Print_ISBN
978-1-4673-7133-9
Electronic_ISBN
2378-6558
Type
conf
DOI
10.1109/ESSDERC.2015.7324717
Filename
7324717
Link To Document