• DocumentCode
    3689011
  • Title

    Systematic comparison of metal contacts on CVD graphene

  • Author

    A. Gahoi;V. Passi;S. Kataria;S. Wagner;A. Bablich;M.C. Lemme

  • Author_Institution
    University of Siegen, School of Science and Technology, Siegen, Germany
  • fYear
    2015
  • Firstpage
    184
  • Lastpage
    187
  • Abstract
    An experimental study was conducted for forming high quality ohmic contacts to graphene. Metal contacts of platinum/gold (Pt/Au), nickel/gold (Ni/Au), palladium (Pd), Ni, and Au to monolayer chemical vapor deposited graphene were studied. The experimental data reveal that pure Au and Ni/Au provide highly reproducible low resistance ohmic contacts. The results presented in this work indicate potential contact metals suitable for high frequency electronic devices.
  • Keywords
    "Graphene","Gold","Nickel","Resistance","Contact resistance","Electrical resistance measurement"
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference (ESSDERC), 2015 45th European
  • ISSN
    1930-8876
  • Print_ISBN
    978-1-4673-7133-9
  • Electronic_ISBN
    2378-6558
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2015.7324744
  • Filename
    7324744