DocumentCode :
3689785
Title :
Graphene wires as alternative interconnects
Author :
I. Asselberghs;M. Politou;B. Soree;S. Sayan;D. Lin;P. Pashaei;C. Huyghebaert;P. Raghavan;I. Radu;Z. Tokei
Author_Institution :
Imec, Leuven, Belgium
fYear :
2015
fDate :
5/1/2015 12:00:00 AM
Firstpage :
317
Lastpage :
320
Abstract :
In this paper, we evaluate the material properties of graphene and compare with Cu in order to assess the potential application of graphene to replace copper wires in BEOL interconnects. Based on circuit and system-level simulations, high restrictions are imposed to graphene with respect to contact resistance and mean free path. Experimentally we measure, a mean-free-path (MFP) of ~150 nm, which exceeds the value for Cu. However, contact engineering will be the key issue for integration of graphene as interconnect.
Keywords :
"Decision support systems","Graphene","Wires"
Publisher :
ieee
Conference_Titel :
Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), 2015 IEEE International
ISSN :
2380-632X
Electronic_ISBN :
2380-6338
Type :
conf
DOI :
10.1109/IITC-MAM.2015.7325590
Filename :
7325590
Link To Document :
بازگشت