Title :
Silica MEMS cantilever arrays
Author :
Peter G. R. Smith;Peter A. Cooper;James C. Gates;Christopher Holmes;Lewis G. Carpenter;P.L. Mennea
Author_Institution :
Optoelectronics Research Centre, University of Southampton, Southampton, UK
Abstract :
This invited paper covers the development of UV written MEMS cantilevers on silica-on-silicon. The work uses novel fabrication tools including physical micromachining and UV laser direct writing. Each cantilever contains an optical waveguide and by actuating the cantilevers we have demonstrated optical attenuation operation in an array format.
Keywords :
"Optical device fabrication","Optical fibers","Optical fiber sensors","Silicon"
Conference_Titel :
Photonics in Switching (PS), 2015 International Conference on
DOI :
10.1109/PS.2015.7329044
