Title :
Passive wireless SAW - MEMS pressure sensor/microphone
Author :
Kirill Stroganov;Vladimir Pashchenko;Vladimir Kalinin;Victor Plessky
Author_Institution :
SAW devices dept., JSC Avangard, Saint-Petersburg, Russia
fDate :
6/1/2014 12:00:00 AM
Abstract :
SAW-MEMS microphone which operation principle is based on electrical field distortion of SAW is proposed. Simulation results of microphone sensitivity performed using COMSOL software are presented. Proposed SAW - MEMS microphone also can be used as a wireless passive accelerometer and pressure sensor. Realization of this device look challenging for MEMs technology.
Keywords :
"Three-dimensional displays","Decision support systems"
Conference_Titel :
European Frequency and Time Forum (EFTF), 2014
DOI :
10.1109/EFTF.2014.7331449
