• DocumentCode
    3693722
  • Title

    Passive wireless SAW - MEMS pressure sensor/microphone

  • Author

    Kirill Stroganov;Vladimir Pashchenko;Vladimir Kalinin;Victor Plessky

  • Author_Institution
    SAW devices dept., JSC Avangard, Saint-Petersburg, Russia
  • fYear
    2014
  • fDate
    6/1/2014 12:00:00 AM
  • Firstpage
    147
  • Lastpage
    149
  • Abstract
    SAW-MEMS microphone which operation principle is based on electrical field distortion of SAW is proposed. Simulation results of microphone sensitivity performed using COMSOL software are presented. Proposed SAW - MEMS microphone also can be used as a wireless passive accelerometer and pressure sensor. Realization of this device look challenging for MEMs technology.
  • Keywords
    "Three-dimensional displays","Decision support systems"
  • Publisher
    ieee
  • Conference_Titel
    European Frequency and Time Forum (EFTF), 2014
  • Type

    conf

  • DOI
    10.1109/EFTF.2014.7331449
  • Filename
    7331449
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3693722