DocumentCode
3701590
Title
Investigation of mechanical properties of the generated surface structures on a chalcogenide thin film with AFM
Author
Judit K?m?n;Attila Bony?r;Istv?n Csarnovics;Csaba Cserh?ti
Author_Institution
Department of Electronics Technology, Budapest University of Technology and Economics, Hungary
fYear
2015
Firstpage
51
Lastpage
55
Abstract
Light induced holographic grating and electron beam induced stripes were created on Ge28Se72 chalcogenide thin film and its local surface mechanical properties were studied by AFM. The Young´s moduli of the grating, the stripes and the reference area were determined through force curves and the tip-sample energy dissipation was calculated from the tapping mode point spectroscopy curves. Significant difference was obtained between the created structures and the reference area regarding the Young´s modulus and the tip-sample energy dissipation.
Keywords
"Films","Photonics"
Publisher
ieee
Conference_Titel
Design and Technology in Electronic Packaging (SIITME), 2015 IEEE 21st International Symposium for
Type
conf
DOI
10.1109/SIITME.2015.7342294
Filename
7342294
Link To Document