• DocumentCode
    3701590
  • Title

    Investigation of mechanical properties of the generated surface structures on a chalcogenide thin film with AFM

  • Author

    Judit K?m?n;Attila Bony?r;Istv?n Csarnovics;Csaba Cserh?ti

  • Author_Institution
    Department of Electronics Technology, Budapest University of Technology and Economics, Hungary
  • fYear
    2015
  • Firstpage
    51
  • Lastpage
    55
  • Abstract
    Light induced holographic grating and electron beam induced stripes were created on Ge28Se72 chalcogenide thin film and its local surface mechanical properties were studied by AFM. The Young´s moduli of the grating, the stripes and the reference area were determined through force curves and the tip-sample energy dissipation was calculated from the tapping mode point spectroscopy curves. Significant difference was obtained between the created structures and the reference area regarding the Young´s modulus and the tip-sample energy dissipation.
  • Keywords
    "Films","Photonics"
  • Publisher
    ieee
  • Conference_Titel
    Design and Technology in Electronic Packaging (SIITME), 2015 IEEE 21st International Symposium for
  • Type

    conf

  • DOI
    10.1109/SIITME.2015.7342294
  • Filename
    7342294