DocumentCode
3704336
Title
Near-field scanning microwave microscope for subsurface non-destructive characterization
Author
Sijia Gu;Kamel Haddadi;Abdelhatif El Fellahi;Tuami Lasri
Author_Institution
Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar? CS 60069 - 59652 Villeneuve d´Ascq Cedex - France
fYear
2015
Firstpage
155
Lastpage
158
Abstract
We report a nondestructive testing system based on near-field scanning microwave microscopy. The instrumentation is built up with a vector network analyzer, a fully automated tuning matching network and an evanescent microwave probe. The system can perform microwave images in the frequency band 0.1-20 GHz on scanning ranges of 25×25 cm2. The spatial resolution is experimentally verified by investigating imaging of metal slots. A lumped element model is built to describe the probe-sample interaction.
Keywords
"Microwave theory and techniques","Probes","Microwave imaging","Spatial resolution","Microscopy","Microwave measurement","Metals"
Publisher
ieee
Conference_Titel
Microwave Conference (EuMC), 2015 European
Type
conf
DOI
10.1109/EuMC.2015.7345723
Filename
7345723
Link To Document