Title :
WR-5.1 band, on-wafer characterization at cryogenic temperatures
Author :
David R. Daughton;Doug McLean;Scott Yano;Alessandro Macor;Emile de Rijk;Arndt von Bieren;Mirko Favre;Matthew Bauwens;Arthur Lichtenberger;N. Scott Barker;Robert M. Weikle;Jeffrey L. Hesler;Cliff Rowland;Eric Bryerton
Author_Institution :
Lake Shore Cryotronics, Inc., Westerville, OH USA
Abstract :
On-wafer probing measurements are demonstrated using a novel cryogenic probe station operating in the WR-5.1 band using corrugated waveguides and at temperatures below 30 K.
Keywords :
"Probes","Cryogenics","Millimeter wave measurements","Waveguide components","Rectangular waveguides"
Conference_Titel :
Microwave Conference (EuMC), 2015 European
DOI :
10.1109/EuMC.2015.7345764
