Un-cooled resonant IR detectors based on Barium Strontium Titanate switchable FBARs

In this paper Barium Strontium Titanate (BST) based thin film bulk acoustic tunable resonators (FBAR) are proposed for un-cooled infrared (IR) detection. Measured TCF as well as other important characteristics of BST based resonators are compared with the previously proposed IR resonant detectors. Optimized BST IR resonators, with their low conductivity, high TCF, and high quality factors can be a strong candidate for IR resonant sensor applications.