A DC-30 GHz high performance packaged RF MEMS SPDT switch

This paper deals with the development of an RF MEMS SPST (Single-Pole Single-Throw) and SPDT (Single-Pole double-Throw) switch fabricated on a glass substrate with hermetic package. The fabricated SPDT switch leads to a compact device (2.3×1.6 mm2) and can address applications ranging from DC to 30 GHz with an isolation of 40 dB and insertion loss better than 0.8 dB on the entire frequency band.