DocumentCode
3704544
Title
A DC-30 GHz high performance packaged RF MEMS SPDT switch
Author
A.H. Zahr;P. Blondy;L.Y. Zhang;C. Dorion;R. St?fanini;F. Courtade;F. Pressecq
Author_Institution
University of Limoges, XLIM CNRS UMR 7252, 123 av. Albert Thomas, 87000, France
fYear
2015
Firstpage
1015
Lastpage
1017
Abstract
This paper deals with the development of an RF MEMS SPST (Single-Pole Single-Throw) and SPDT (Single-Pole double-Throw) switch fabricated on a glass substrate with hermetic package. The fabricated SPDT switch leads to a compact device (2.3×1.6 mm2) and can address applications ranging from DC to 30 GHz with an isolation of 40 dB and insertion loss better than 0.8 dB on the entire frequency band.
Keywords
"Radio frequency","Micromechanical devices","Insertion loss","Loss measurement","Switching circuits","Microswitches"
Publisher
ieee
Conference_Titel
Microwave Conference (EuMC), 2015 European
Type
conf
DOI
10.1109/EuMC.2015.7345938
Filename
7345938
Link To Document