• DocumentCode
    3704544
  • Title

    A DC-30 GHz high performance packaged RF MEMS SPDT switch

  • Author

    A.H. Zahr;P. Blondy;L.Y. Zhang;C. Dorion;R. St?fanini;F. Courtade;F. Pressecq

  • Author_Institution
    University of Limoges, XLIM CNRS UMR 7252, 123 av. Albert Thomas, 87000, France
  • fYear
    2015
  • Firstpage
    1015
  • Lastpage
    1017
  • Abstract
    This paper deals with the development of an RF MEMS SPST (Single-Pole Single-Throw) and SPDT (Single-Pole double-Throw) switch fabricated on a glass substrate with hermetic package. The fabricated SPDT switch leads to a compact device (2.3×1.6 mm2) and can address applications ranging from DC to 30 GHz with an isolation of 40 dB and insertion loss better than 0.8 dB on the entire frequency band.
  • Keywords
    "Radio frequency","Micromechanical devices","Insertion loss","Loss measurement","Switching circuits","Microswitches"
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference (EuMC), 2015 European
  • Type

    conf

  • DOI
    10.1109/EuMC.2015.7345938
  • Filename
    7345938