DocumentCode
3706355
Title
Full-band modeling of mobility in p-type FinFETs
Author
Z. Stanojević;O. Baumgartner;M. Karner;La. Filipović;C. Kernstock;H. Kosina
Author_Institution
Institute for Microelectronics, TU Wien, Guß
fYear
2014
fDate
6/1/2014 12:00:00 AM
Firstpage
1
Lastpage
2
Abstract
We present a framework for modeling the low-field mobility of ultra-narrow Si channels such as FinFETs based on a full-band description of the electronic structure. Hole mobility is of particular interest since its calculation necessitates a full-band approach. Our approach is entirely based on physical modeling and thus naturally includes effects of gate field, crystal orientation, or strain.
Keywords
"Scattering","Computational modeling","Semiconductor process modeling","FinFETs","Silicon","Logic gates","Strain"
Publisher
ieee
Conference_Titel
Silicon Nanoelectronics Workshop (SNW), 2014 IEEE
Print_ISBN
978-1-4799-5676-0
Type
conf
DOI
10.1109/SNW.2014.7348592
Filename
7348592
Link To Document