DocumentCode
3706378
Title
Graphene-based piezoresistive pressure sensing for uniaxial and biaxial strains
Author
Anderson David Smith;Frank Niklaus;Sam Vaziri;Andreas C. Fischer;Fredrik Forsberg;Stephan Schröder;Mikael Östling;Max Christian Lemme
Author_Institution
KTH Royal Institute of Technology, School of ICT, 16440 Kista, Sweden
fYear
2014
fDate
6/1/2014 12:00:00 AM
Firstpage
1
Lastpage
2
Abstract
The piezoresistive effect in graphene has been experimentally demonstrated for both uniaxial and biaxial strains. For uniaxial strain, rectangular membranes were measured while circular membranes provided biaxial strain. Gauge factors have also been extracted and compared to previous literature as well as simulations.
Keywords
"Graphene","Pressure sensors","Cavity resonators","Piezoresistance","Strain"
Publisher
ieee
Conference_Titel
Silicon Nanoelectronics Workshop (SNW), 2014 IEEE
Print_ISBN
978-1-4799-5676-0
Type
conf
DOI
10.1109/SNW.2014.7348615
Filename
7348615
Link To Document