Title :
Graphene-based piezoresistive pressure sensing for uniaxial and biaxial strains
Author :
Anderson David Smith;Frank Niklaus;Sam Vaziri;Andreas C. Fischer;Fredrik Forsberg;Stephan Schröder;Mikael Östling;Max Christian Lemme
Author_Institution :
KTH Royal Institute of Technology, School of ICT, 16440 Kista, Sweden
fDate :
6/1/2014 12:00:00 AM
Abstract :
The piezoresistive effect in graphene has been experimentally demonstrated for both uniaxial and biaxial strains. For uniaxial strain, rectangular membranes were measured while circular membranes provided biaxial strain. Gauge factors have also been extracted and compared to previous literature as well as simulations.
Keywords :
"Graphene","Pressure sensors","Cavity resonators","Piezoresistance","Strain"
Conference_Titel :
Silicon Nanoelectronics Workshop (SNW), 2014 IEEE
Print_ISBN :
978-1-4799-5676-0
DOI :
10.1109/SNW.2014.7348615
