DocumentCode :
3710545
Title :
[Title page]
fYear :
2015
Firstpage :
1
Lastpage :
1
Abstract :
The following topics are dealt with: MEMS and microsensors; VLSI; photonic crystal; and nanotechnology.
Publisher :
ieee
Conference_Titel :
Micro and Nanoelectronics (RSM), 2015 IEEE Regional Symposium on
Type :
conf
DOI :
10.1109/RSM.2015.7354899
Filename :
7354899
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3710545
