DocumentCode
3710795
Title
Influence of strain field on nanoscale electronic processes in silicon-based semiconductors
Author
Ana-Maria Lepadatu;Catalin Palade;Adrian Slav;Sorina Lazanu
Author_Institution
National Institute of Materials Physics, 077125 Magurele, Romania
fYear
2015
Firstpage
41
Lastpage
44
Abstract
The effects of strain field are studied in Si wafers implanted with heavy iodine and bismuth ions and in multi-quantum well structures. The experimental method of thermally stimulated currents without applied bias is used, and the trapping centres parameters are determined by modelling the discharge curves. In both cases, the strain field produces temperature-dependent parameters of trapping levels. So, due to the high strain field in the neighbourhood of implanted ions, energy levels broaden and cross sections become temperature dependent. In multilayer structures, for the trapping centres corresponding to strain-induced defects both concentrations and capture cross sections are temperature dependent.
Keywords
"Strain","Charge carrier processes","Silicon","Ions","Temperature dependence","Temperature measurement","Bismuth"
Publisher
ieee
Conference_Titel
Semiconductor Conference (CAS), 2015 International
ISSN
1545-827X
Print_ISBN
978-1-4799-8862-4
Type
conf
DOI
10.1109/SMICND.2015.7355154
Filename
7355154
Link To Document